Water solubility and diffusivity in BCB resins used in microelectronic packaging and sensor applications

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn 2, Issue , 2005, Pages 792-796

  Tetelin, A ^a   Achen, A ^b   Pouget, V ^a   Pellet, C ^a   Topper M ^c   Lachaud, J L ^a  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b Dow Deutschland GmbH   (Germany)

^c FRAUNHOFER IZM   (Germany)

Author keywords

BCB; Diffusion in polymers; Humidity sensors; Wafer level packaging

Indexed keywords

CAPACITANCE; DIELECTRIC MATERIALS; DIFFUSION; MICROELECTRONIC PROCESSING; RESINS; SENSORS; SOLUBILITY;

BCB RESINS; MICROELECTRONIC PACKAGING; POLYMER DIELECTRIC; WATER SOLUBILITY;

ELECTRONICS PACKAGING;

EID: 33847125242     PISSN: 10915281     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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2. Cyclotene, Trademark of the Dow Chemical Company, www.dow.comcyclotene index.html, 1995-2005.
3. A. Tetelin, V. Pouget, J-L. Lachaud, C. Pellet, Dynamic Behavior of a Chemical Sensor for Humidity Level Measurement in Human Breath, IEEE Trans. Instrum. Meas. 53 (2004), pp. 1262-1267.
4. A. Tetelin, C. Pellet, J-Y. Deletage, B. Carbonne, Y. Danto, Moisture Diffusion in BCB Resins used for MEMS Packaging, Microelectronics Reliability 43 (2003), pp. 1939-1944.
5. A. Tetelin, C. Pellet, J-Y. Deletage, B. Carbonne, Y. Danto, Moisture Diffusion in BCB Resins used for MEMS Packaging, Microelectronics Reliability 43 (2003), pp. 1939-1944.
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