Gas detecting langasite membranes by wet chemical etching

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 235-238

  Ansorge, E ^a   Schimpf, S ^a   Hirsch, S ^a   Schmidt, B ^a   Sauerwald, J ^b   Fritze, H ^b  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ETCHING; GAS DETECTORS; HIGH TEMPERATURE OPERATIONS; LANTHANUM COMPOUNDS; PIEZOELECTRIC DEVICES;

GAS DETECTING LANGASITE MEMBRANES; GAS SENSING; LANTHANUM GALLIUM SILICATES; PIEZOELECTRICALLY ACTUATED MEMBRANES;

GAS PERMEABLE MEMBRANES;

EID: 33847266870     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597679     Document Type: Conference Paper

References (14)

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