Microelectromechanical structures in langasite (La3Ga 5SiO14) by wet chemical etching

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 908-911

  Ansorge, E ^a   Schimpf, S ^a   Hirsch, S ^a   Schmidt, B ^a   Sauerwald, J ^b   Fritze, H ^b  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

High temperature MEMS; Langasite; Microstructures; Wet chemical etching

Indexed keywords

HIGH TEMPERATURE MEMS; LANGASITE; MICROELECTROMECHANICAL STRUCTURES; WET CHEMICAL ETCHING;

ETCHING; LANTHANUM COMPOUNDS; MASKS; MICROSTRUCTURE; PIEZOELECTRIC MATERIALS; RESONANCE; SILICON COMPOUNDS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544496178     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496565     Document Type: Conference Paper

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