Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 762-765

  Spannhake, Jan ^a   Schulz, Olaf ^a   Helwig, Andreas ^a   Müller, Gerhard ^a   Doll, Theodor ^b  

^a AIRBUS GROUP INNOVATIONS   (Germany)

^b Institut für Mikroteclmik Mainz GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ENVIRONMENTAL IMPACT; INFRARED DEVICES; LIGHT EMISSION; MICROELECTROMECHANICAL DEVICES; SENSITIVITY ANALYSIS;

LIGHT BULBS; NON DISPERSIVE INFRARED (NDIR); THERMAL INFRARED SOURCES;

CHEMICAL SENSORS;

EID: 33847255466     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597811     Document Type: Conference Paper

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