Reliability of RF-MEMS

GAAS 2005 Conference Proceedings - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium

Volumn 2005, Issue , 2005, Pages 269-272

  Gaddi, Roberta ^a   Gnudi, Antonio ^a   Tazzoli, Augusta ^b   Meneghesso, Gaudenzio ^b   Zanoni, Enrico ^b  

^a UNIVERSITY OF BOLOGNA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; MICROWAVES; OHMIC CONTACTS; RELIABILITY THEORY; SEMICONDUCTOR SWITCHES; SUPERCONDUCTING ELECTRIC LINES;

ELECTROSTATIC DISCHARGE; MICROWAVE APPLICATIONS; OHMIC DEVICES; OHMIC SHUNT SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 33847250559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. G. Rebeiz, "RF MEMS in full CMOS radio SOC", in 2005 MTT-S Int. Microwave Symp. Workshop Notes, WSE: Full CMOS Radio, Long Beach, CA, June 12-17 2005.
2. J. Maciel, "Recent Reliability Results in RF MEMS", in Proceedings of the 2005 IEEE MTT-S Int. Microwave Symp. Workshop Notes, WFE: Recent Applications in RF MEMS, Long Beach, CA, June 12-17 2005.
3. J.L. Zunino III, et Al., "Micro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities", Proc. 2005 NSTI Nanotechnology Conference and Trade Show (Nanotech), Anaheim, CA, May 8-12 2005, Vol. 3, pp.463-466.
4. M. Zecchino, "Characterizing MEMS devices through transparent media", Veeco Intruments Inc. Application Note AN528-1-1204; www.veeco.com
5. J. Wibbeler, et Al.,"Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)", Sensors and Actuators A: Physical, pp.74-80, Nov. 1998.
6. th European Microwave Conference, Amsterdam, 11-15 Oct 2004, Vol. 1, pp. 77-80.
7. J. A. Warren et al, "Human Body Model, Machine Model and Charged Device Model ESD Testing of Surface Micromachimed Microelectromechanical Systems (MEMS)" EOS/ESD Symp. 2001,p. 238-248.
8. nd Ed, Jon WILEY and Sons, 2002, pag. 47-57.