Design and fabrication of a MEMS-based electrolytic tilt sensor

Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference

Volumn 2005, Issue , 2005, Pages 216-217

  Kang, Ik Su ^b   Jung, Ho ^b   Kim, Dong Sun ^b   Kwon, Byong Jo ^b   Kim, Chang Jin ^b   Kim, Woo Jeong ^a   Choi, Sie Young ^b   Lee, Jong Hyun ^b   Shin, Jang Kyoo ^b   Kong, Seong Ho ^b  

^a MENTech Co Ltd   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA ARRAYS; AVIONICS; CHEMICAL VAPOR DEPOSITION; ENERGY UTILIZATION; ETCHING; EVAPORATION; SENSORS;

ELECTROLYTIC TILT SENSORS; METAL MOLECULES; SILICON CAVITY; THERMAL EVAPORATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33847194687     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. th Annual International Conf., Jan, 2000, pp. 148-152.
2. th Annual Meeting of the IEEE Vol. 2, 2003, pp.700-701.