Lifetime characterization of capacitive power RF MEMS switches

GAAS 2005 Conference Proceedings - 13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium

Volumn 2005, Issue , 2005, Pages 509-512

  Ziaei, Afshin ^a   Dean, Thierry ^a   Mancuso, Yves ^b  

^a THALES RESEARCH AND TECHNOLOGY   (France)

^b THALES   (France)

Author keywords

Lifetime; Power; PZT; RF MEMS; Switch

Indexed keywords

CAPACITANCE; ELECTRIC POWER MEASUREMENT; MICROWAVE DEVICES; PHASE SHIFTERS; POWER ELECTRONICS; SWITCHED FILTERS;

CAPACITIVE POWER; LIFETIME CHARACTERIZATION; POWER HANDLING CAPABILITIES; RF/MICROWAVE APPLICATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 33847175905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. K. E. Peterson, "Micromechanical membrane switches on silicon, " IBM J. Res. Develop., vol. 23, no. 4, pp. 376-385, July 1979
2. E. R. Brown, " RF-MEMS Switches for Reconfigurable Integrated Circuits, " IEEE Trans. Microwave Theory Tech., Vol. 46, No. 11, pp. 1868-1880, Nov. 1998
3. C.L. Goldsmith, "Performance of low loss RF MEMS capacitive switches" IEEE Microwave and Guided Wave Letters, Vol8, No. 8, August 1998.
4. C. Goldsmith, T.H. Lin, B. Powers, W.R. Wu, And B. Norwell, "Micromechanical membrane switches formicrowave applications", IEEE MTT-S Digest, 1995, pp 91-94.
5. Goldsmith, C.; Ehmke, J.; Malczewski, A.; Pillans, B.; Eshelman, S.; Yao, Z.; Brank, J.; Eberly, M., "Lifetime characterization of capacitive RF MEMS switches ", IEEE Int. Microwave Symp. Dig, 2001 Volume: 1, 20-25 May 2001, page(s): 227 -230 vol.1