GHz frequency ZnO/Si SAW device

Proceedings - IEEE Ultrasonics Symposium

Volumn 4, Issue , 2005, Pages 2174-2177

  Le Brizoual, L ^a   Sarry, F ^a   Elmazria, O ^a   Alnot, P ^a   Pastureaud, Th ^b   Ballandras, S ^b   Laude, V ^b  

^a INSTITUT JEAN LAMOUR   (France)

^b FEMTO ST INSTITUTE   (France)

Author keywords

Elastic guided waves; FEA BEM; High frequency; Thin piezoelectric films; ZnO

Indexed keywords

BOUNDARY ELEMENT METHOD; FINITE ELEMENT METHOD; PHOTOLITHOGRAPHY; SILICON; THIN FILMS; ULTRASONIC TRANSDUCERS; ZINC OXIDE;

ELASTIC GUIDED WAVES; HIGH FREQUENCY; THIN PIEZOELECTRIC FILMS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 33847158342     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603313     Document Type: Conference Paper

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