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Volumn 1, Issue , 2005, Pages
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Above IC MEMS capacitors for integrated reconfigurable circuits
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Author keywords
Above IC; Microtechnology; RF MEMS; Wireless communication
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Indexed keywords
CAPACITORS;
COMPUTER SIMULATION;
INTEGRATED CIRCUIT LAYOUT;
MICROELECTROMECHANICAL DEVICES;
MICROWAVES;
MILLIMETER WAVES;
MEMS CAPACITORS;
MICROTECHNOLOGY;
MICROWAVE NETWORKS;
MILLIMETERWAVE FREQUENCIES;
RF MEMS;
WIRELESS TELECOMMUNICATION SYSTEMS;
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EID: 33847119488
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/APMC.2005.1606188 Document Type: Conference Paper |
Times cited : (5)
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References (6)
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