Tool-based nanofinishing and micromachining

Journal of Materials Processing Technology

Volumn 185, Issue 1-3, 2007, Pages 2-16

  Rahman, M ^a   Lim, H S ^a   Neo, K S ^a   Senthil Kumar, A ^a   Wong, Y S ^a   Li, X P ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

ELID grinding; Hybrid machining; Micro EDM; Micro turning; Tool based machining

Indexed keywords

COST EFFECTIVENESS; ELECTRIC DISCHARGES; LITHOGRAPHY; MICROMACHINING; NANOTECHNOLOGY; PRODUCTION CONTROL;

CHEMICAL MECHANICAL POLISHING (CMP); ELID GRINDING; HYBRID MACHINING; MICRO TURNING; TOOL-BASED MACHINING;

MACHINE TOOLS;

EID: 33847117598     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2006.03.121     Document Type: Article

References (19)

1. Okuyama H., and Takada H. Micromachining with SR and FEL. Nucl. Instrum. Methods Phys. Res. B 144 (1998) 58-65
2. Matsui S., Kaito T., Fujita J.-I., Ishida M., and Ochiai Y. Three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition. J. Jpn. Soc. Prec. Eng. 67 9 (2001) 1412-1415 (in Japanese)
3. Lu Z., and Yoneyama T. Micro cutting in the micro lathe turning system. Int. J. Mach. Tools Manuf. 39 (1999) 1171-1183
4. Rahman M., Kumar A.S., and Prakash J.R.S. Micro milling of pure copper. J. Mater. Process. Technol. 116 (2001) 39-43
5. R. Murata, K. Okano, C. Tsutsumi, Grinding of structural ceramics, Milton C Shaw Grinding Symposium PED, vol. 16, 1985, pp. 261-272.
6. Omori H., and Nakagawa T. Mirror surface grinding of silicon wafers with electrolytic in-process dressing. Ann. CIRP 39 1 (1990) 329-333
7. Masuzawa T., Kuo C.L., and Fujino M. Drilling of deep micro holes by EDM. Ann. CIRP 38 (1989) 195-198
8. Masuzawa T., Kuo C.L., and Fujino M. A combined electrical machining process for micronozzle fabrication. Ann. CIRP 43 (1994) 189-192
9. Jacobsen S.C., Price R.H., Wood J.E., Rytting T.H., and Rahaelof M. The wobble motor: design, fabrication and testing of an eccentric motion electrostatic microactuator. Proceedings of the IEEE International Conference on Robotics Automation. Scottsdale, AZ, USA, 14-19 May (1989) 1536-1545
10. Wilks J., and Wilks E. Properties and Applications of Diamond (1991), Butterworth Einemann Publications, Oxford (Chapter 13)
11. Dini J.W., Syn C.K., Taylor J.S., Mara G.L., Vandervoort R.R., and Donaldson R.R. Influence of phosphorus content and heat treatment on the machinability of electroless nickel deposits. Proceedings of the IVth Electroless Nickel Conference (Chicago) (1995), Gardner Publications, Cincinnati 5-1-5-15
12. Pramanik A., Neo K.S., Rahman M., Li X.P., Sawa M., and Meada Y. Cutting performance of diamond tools during ultra-precision turning of electroless nickel plated die materials. J. Mater. Process. Technol. 140 1-3 (2003) 308-313
13. Blackley W.S., and Scattergood R.O. Chip topography for ductile-regime machining of germanium. ASME Trans. J. Eng. Ind. 116 (1994) 263-266
14. Fang F.Z., and Venkatesh V.C. Diamond cutting of silicon with nanometric finish. Ann. CIRP 47 (1998) 45-49
15. Yan J., Syoji K., Kuriyagawa T., and Suzuki H. Ductile regime turning at large tool feed. J. Mater. Process. Technol. 121 (2002) 363-372
16. Lucca D.A., Chou P., and Hocken R.J. Effect of tool edge geometry on the nanometric cutting of Ge. Ann. CIRP 47 (1998) 475-478
17. K. Liu, X.P. Li, M. Rahman, K.S. Neo, C.C. Chan, X.D. Liu, A study of the effect of tool cutting edge radius on ductile cutting of silicon wafers, Int. J. Adv. Manuf. Tech., in press.
18. Li X.P., Rahman M., Liu K., Neo K.S., and Chan C.C. Nano-precision measurement of diamond tool edge radius for wafer fabrication. J. Mater. Process. Technol. 140 (2003) 358-362
19. Lim H.S., Senthil Kumar A., and Rahman M. Improvement of form accuracy in hybrid machining of microstructure. J. Electron. Mater. 31 10 (2002) 1032-1038