Dynamic characterization of thermo-resistive micro-sensor

Conference Record - IEEE Instrumentation and Measurement Technology Conference

Volumn 3, Issue , 2005, Pages 1647-1651

  Lira, José G A ^a   Oliveira Jr , Adeilton C ^b   Freire, Raimundo C S ^a   Doi, Ioshiaki ^b   Luciano, Benedito A ^a   Swart, Jacobus W ^a  

^a FEDERAL UNIVERSITY OF CAMPINA GRANDE   (Brazil)

^b UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER DISTRIBUTION; HEAT RESISTANCE; MICROMACHINING; THERMOELECTRICITY;

THERMAL TIME CONSTANT; THERMOELECTRIC PROPERTIES; THERMORESISTIVE SENSORS;

MICROSENSORS;

EID: 33847111556     PISSN: 10915281     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)

1. Bentley, J. P., Temperature sensor characteristics and measurement design, J. Phys. E: Sci Instum, vol. 17, pp. 430-439. 1984.
2. Okamoto, K. et al., A digital anemometer, IEEE Transactions on Instrumentation and Measurement, vol. 43, no. 2, pp. 116-120, Apr. 1994.
3. Fujita, H. et al., A thermistor anemometer for low-flow-rate measurement, IEEE Transactions on Instrumentation and Measurement, vol.44, no. 3, p. 779-782, Jun 1995.
4. Mochizuki, K. and Watanabe, K., A linear resistance-to-frequency converter, Instrumentation and Measurement Technology Conference, 1995, IEEE, 1995, pp. 339-343.
5. Mullins, M. A. et al., Potential for a smart sensor based on an integrated silicon anemometer, Sensor and Actuators A, 46-47, pp. 342-348, 1995.
6. Lerne, C. A., Malcovanti, P. and Baltes, H., Oversample interface for IC sensor with minimized analog content, IEEE Transactions on Instrumentation and Measurement, vol. 44, no. 3, pp. 647-651, Jun 1995.
7. Kohl, F. et al, A micromachined flow sensor for liquid and gaseous fluids, Sensors and Actuators A, 41-42, pp. 293-299, 1994.
8. Stankovic, D., Zlatanovic, M., A versatile computer controlled measuring system for recording voltage-current characteristics of various resistance sensors, Sensors and Actuators A, vol. 41-42, pp. 612-616. 1994.
9. Kaliyugavaradan, A linear resistance-to-time converter with high resolution, IEEE Transactions on Instrumentation and Measurement, vol. 42, no 5, pp. 952-956. 2000.
10. Yankov, I. Y., Gigov, C. I., Yankov, E. A., Linear Temperature-to-Time Period converter using Standard Thermistors, Meas. Sci Technol. no 1, pp. 1168-1171. 1990.
11. Oliveira, A.; Freire, R.C.S. and Deep, G.S., An Anemometer with PWM Excitation, IECON'95, Nov 1995,Orlando, FLA, EEUU, pp. 893-897.
12. Freire, R.C.S,. Deep, G.S.; Lobo, P.C.; Oliveira, A. dynamic response of a feedback fhermoresistive electrical substitution pyranometer, Journal of Solar Energy Engineering, vol. 120, pp. 126-130, May 1998.
13. Freire, R.C.S,. Deep, G.S. Error in the thermoresistive sensor-based feedback measurement configuration due to DC amplifier offset voltage. IEEE Transactions on Instrumentation and Measurement, vol. 48, n. 1, pp. 50-54, 1999.
14. Freire, R.C.S. et al. Experimental determination of time constant of a thermoresistive sensor. IEEE Instrumentation and Measurement Technology Conference, 1994, pp. 1279-1281.
15. Zubel, I., Barycka, I., Silicon anisotropic etching in alkaline solutions I. The geometric description of figures developed under etching Si(100) in various solutions, Sensors and Actuators A 70, 1998, pp. 250-259.
16. Manea, E., Muller, R., Popescu, A., Some particular aspects of the thin membrane by boron diffusion processes, Sensors and Actuators A 74, 1999, pp. 91-94.
17. Deep, G.S.; Oliveira, A.; Freire, R.C.S.; França, M.B.M., Thermodynamic modeling of a thermoresistive sensor using electrical power step. International Conference on Electronics, Circuits and Systems, Pafos. International Conference on Electronics, Circuits and Systems. IEEE, 1999. vol. III, pp. 1301-1304.
18. Freire, Deep, G.S.; Lobo, P.C. Experimental determination of time constant of a thermoresistive sensor. IEEE Instrumentation and Measurement Technology Conference, 1994, Hamamatsu. IMTC'94: 1994. pp. 1279-1281.