Lifetime characterization of capacitive power RF MEMS switches

35th European Microwave Conference 2005 - Conference Proceedings

Volumn 3, Issue , 2005, Pages 1455-1458

  Ziaei, Afshin ^a   Dean, Thierry ^a   Mancuso, Yves ^b  

^a Thaies Research and Technology France   (France)

^b THALES   (France)

Author keywords

Lifetime; Power; PZT; RF MEMS; Switch

Indexed keywords

ANTENNA ARRAYS; CAPACITANCE; MICROELECTROMECHANICAL DEVICES; MICROWAVES; PHASE SHIFTERS;

CAPACITIVE POWER; MEMS SWITCHES; SILICON SUBSTRATES;

ELECTRIC SWITCHES;

EID: 33847102787     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EUMC.2005.1610224     Document Type: Conference Paper

References (5)

1. K. E. Peterson, "Micromechanical membrane switches on silicon, " IBM J. Res. Develop., vol. 23, no. 4, pp. 376-385, July 1979
2. E. R. Brown, " RF-MEMS Switches for Reconfigurable Integrated Circuits, " IEEE Trans. Microwave Theory Tech., Vol. 46, No. 11, pp. 1868-1880, Nov. 1998
3. C.L. Goldsmith, "Performance of low loss RF MEMS capacitive switches" IEEE Microwave and Guided Wave Letters, Vol8, No. 8, August 1998.
4. C. Goldsmith, T.H. Lin, B. Powers, W.R. Wu, And B. Norwell, "Micromechanical membrane switches formicrowave applications", IEEEMTT-SDigest, 1995, pp 91-94.
5. Goldsmith, C.; Ehmke, J.; Malczewski, A.; Pillans, B.; Eshelman, S.; Yao, Z.; Brank, J.; Eberly, M., "Lifetime characterization of capacitive RF MEMS switches ", IEEE Int. Microwave Symp. Dig, 2001 Volume: 1, 20-25 May 2001, page(s): 227 -230 vol.1