Mechanical design and force calibration of dual-axis micromechanical probe for friction force microscopy

Journal of Applied Physics

Volumn 101, Issue 3, 2007, Pages

  Fukuzawa, Kenji ^a,b   Terada, Satoshi ^a   Shikida, Mitsuhiro ^a   Amakawa, Hiroaki ^a   Zhang, Hedong ^a   Mitsuya, Yasunaga ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; FORCE CONTROL; MICROSCOPIC EXAMINATION; NANOSTRUCTURED MATERIALS; SURFACE STRUCTURE;

FRICTION FORCE MICROSCOPES (FFM); MICROFABRICATION; MICROMECHANICAL PROBES; VERTICAL FORCE DETECTION;

PROBES;

EID: 33847101325     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2434825     Document Type: Article

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