Nano-structured CrN/CNx multilayer films

Key Engineering Materials

Volumn 334-335 II, Issue , 2007, Pages 893-896

  Vyas, A ^a   Shen, Y G ^a   Zhou, Z F ^a   Li, K Y ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

CrN CNx multilayers; Microstructure; Reactive closed field unbalanced magnetron sputtering; Stress; Surface roughness; X ray photoelectron spectroscopy

Indexed keywords

MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; SUBSTRATES; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

MULTILAYERED FILMS; REACTIVE CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING; ROOT-MEAN-SQUARE (RMS);

THIN FILMS;

EID: 33847038793     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-427-8.893     Document Type: Conference Paper

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