Measured limits of detection based on thermal-mechanical frequency noise in micromechanical sensors

Applied Physics Letters

Volumn 90, Issue 5, 2007, Pages

  Stievater, T H ^a   Rabinovich, W S ^a   Papanicolaou, N A ^a   Bass, R ^a   Boos, J B ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULES; NATURAL FREQUENCIES; OPTICAL RESONATORS; SENSORS; VIBRATION MEASUREMENT;

FLEXURAL MODES; FREQUENCY NOISE; MECHANICAL NOISE;

THERMAL NOISE;

EID: 33847003666     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2450643     Document Type: Article

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