Poly-Si TFT technology: Advances in material, process and device technology

ECS Transactions

Volumn 3, Issue 8, 2006, Pages 157-165

  Voutsas, A T ^a  

^a SHARP LABORATORIES OF AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; ELECTRIC INSULATORS; GATES (TRANSISTOR); PLASMA APPLICATIONS; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY;

GATE INSULATOR TECHNOLOGY; PLASMA DAMAGE; PLASMA DEPOSITION TECHNOLOGY;

THIN FILM TRANSISTORS;

EID: 33847001667     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2356349     Document Type: Conference Paper

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