A vaporizer for decaborane and octadecaborane

AIP Conference Proceedings

Volumn 866, Issue , 2006, Pages 178-181

  Adams, Doug ^a   Horsky, Tom ^a   Gilchrist, Glen ^a   Milgate, Robert ^a   Sweeney, Joe ^b   Marganski, Paul ^b  

^a Ceradyne Inc   (United States)

^b ENTEGRIS INC   (United States)

Author keywords

Clusterboron ; Decaborane; Ion source; Octadecaborane; Vaporizer

Indexed keywords

EID: 33846974731     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2401489     Document Type: Conference Paper

References (3)

1. Miller, G., "The Vapor Pressure of Solid Decaborane", Journal of Physical Chemistry, Vol. 67, pp. 1363-1364, 1963.
2. 14)," Journal of Research of the National Bureau of Standards, Vol. 55, No. 5, p. 255-260, November 1995.
3. Perel, A.S.., et al "Decaborane Ion Implantation" IIT(2000) pp304-307.