Phase transformations of an alumina membrane and its influence on silicon nucleation during the aluminium induced layer exchange

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3740-3744

  Stoger Pollach M ^a   Walter, T ^a   Muske, M ^b   Gall, S ^b   Schattschneider, P ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b HAHN MEITNER INSTITUT   (Germany)

Author keywords

61.50.Ks (Crystallographic aspects of phase transitions); 68.37.Lp (TEM STEM HRTEM); 68.55.Ac (Nucleation in film growth)

Indexed keywords

CRYSTALLIZATION; FILM GROWTH; MEMBRANES; NUCLEATION; PHASE TRANSITIONS; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINA MEMBRANE; LAYER EXCHANGE PROCESS; THIN MEMBRANE;

ALUMINA;

EID: 33846939575     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.09.038     Document Type: Article

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