Preparation of defined structures on very thin foils for characterization of AFM probes

Microelectronic Engineering

Volumn 84, Issue 3, 2007, Pages 528-531

  Romanus, H ^a   Schadewald, J ^a   Cimalla, V ^a   Niebelschutz M ^a   Machleidt, T ^a   Franke, K H ^a   Spiess, L ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

AFM; Defined structures; FIB; Tip geometry; Very thin foils

Indexed keywords

ALGORITHMS; ATOMIC FORCE MICROSCOPY; IMAGE QUALITY; IMAGE RECONSTRUCTION; ION BEAMS; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE;

FOCUSED ION BEAM (FIB); STRUCTURED FOILS; VERY THIN FOILS;

METAL FOIL;

EID: 33846920300     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.077     Document Type: Article

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