Experimental investigation of photomask with near-field polarization imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6349 I, Issue , 2006, Pages

  Chen, Tao ^a   Milster, Tom D ^a   Yang, Seung Hune ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

AltPSM; High resolution; Near field; Polarization; Solid immersion lens (SIL); Topographical image

Indexed keywords

IMAGING SYSTEMS; IMAGING TECHNIQUES; INTERFEROMETERS; LENSES; PHOTOLITHOGRAPHY; POLARIZATION;

NEAR FIELD POLARIZATION IMAGING; PHOTOMASK; SOLID IMMERSION LENS (SIL); TOPOGRAPHICAL IMAGE;

MASKS;

EID: 33846638804     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.686420     Document Type: Conference Paper

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