Silicon microphone development and application

Sensors and Actuators, A: Physical

Volumn 133, Issue 2 SPEC. ISS., 2007, Pages 283-287

  Dehé, Alfons ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Directional microphone; Microphone; Packaging; Silicon micromachining

Indexed keywords

POLYMERIC MEMBRANES; POLYSILICON; PRODUCT DESIGN; SEMICONDUCTING SILICON; SIGNAL TO NOISE RATIO; SUSTAINABLE DEVELOPMENT;

CARDIOID RESPONSES; DIRECTIONAL MICROPHONES; SILICON MICROMACHINING;

MICROPHONES;

EID: 33846611999     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.06.035     Document Type: Article

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