Mechanism of megasonic damages for micro patterns

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6349 I, Issue , 2006, Pages

  Suwa, Y ^a   Shimada, S ^a   Shigihara, A ^a   Ishii, H ^a   Shoji, Y ^a   Otsuki, M ^a   Naito, A ^a   Sasaki, S ^a   Mohri, H ^a   Hayashi, N ^a  

^a DAI NIPPON PRINTING CO LTD   (Japan)

Author keywords

Cavitation; Cleaning; Damage; Gaussian distribution; Megasonic; SRAF

Indexed keywords

ACOUSTIC VARIABLES CONTROL; CAVITATION; PROBABILITY DISTRIBUTIONS; SURFACE TREATMENT;

ACOUSTIC PRESSURE; MEGASONIC CLEANING; MICROPATTERNS; PARTICLE REMOVAL EFFICIENCY (PRE);

MASKS;

EID: 33846602799     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.690558     Document Type: Conference Paper

References (3)

1. D. Krefting, R. Mettin, and W. Lauterbom, Ultrasonics 11, 119-123 (2004).
2. T. Ohmi, Wet process ga hiraku product innovation, Realize Advanced Technology Ltd. Tokyo (2001).
3. G. W. Ferrell and L. A. Cruma, J. Acoust. Soc. Am. 112, 1196-1201 (2002).