Study of long-term drift of a porous silicon humidity sensor and its compensation using ANN technique

Sensors and Actuators, A: Physical

Volumn 133, Issue 2 SPEC. ISS., 2007, Pages 472-479

  Islam, T ^a   Saha, H ^a  

^a JADAVPUR UNIVERSITY   (India)

Author keywords

Aging; ANN; Compensation; Humidity sensing; Implementation; Long term drift; Porous silicon sensor (PS)

Indexed keywords

ATMOSPHERIC HUMIDITY; MATHEMATICAL MODELS; NEURAL NETWORKS; POROUS SILICON;

ELECTRONICS CIRCUIT; HUMIDITY SENSING; LONG TERM DRIFT; POROUS SILICON SENSORS (PS);

SILICON SENSORS;

EID: 33846560216     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.019     Document Type: Article

References (21)

1. Rittersma Z.M. Recent achievements in miniaturized humidity sensors-a review of transduction techniques. Sens. Actuators A 96 (2002) 196-210
2. Das J., Dey S., Hossain S.M., Rittersma Z.M., and Saha H. A hygrometer comprising a porous silicon humidity sensor with phase detection electronics. IEEE Sens. J. 3 (2003) 414-420
3. G. Marsh, Porous silicon a useful imperfection, Mater. Today (2002) 36-41.
4. Islam T., Mistry K.K., Sengupta K., and Saha H. Measurement of gas moisture in the ppm range by porous silicon (PS) and porous alumina sensor. Sens. Mater. 16 7 (2004) 345-356
5. Furjes P., Kovacs A., Ducso C., Adam M., Muller B., and Mescheder U. Porous silicon-based humidity sensor with interdigital electrodes and internal heaters. Sens. Actuators B 95 (2003) 140-144
6. Islam T., and Saha H. Hysteresis compensation of porous silicon relative humidity sensor using ANN technique. Sens. Actuators B 114 (2006) 334-343
7. Di Francia G., Castaldo A., Massera E., and Nasti I. A very sensitive porous silicon based humidity sensor. Sens. Actuators B 111-112 (2005) 135-139
8. Hossain S.M., Chakraborty S., Dutta S.K., Das J., and Saha H. Stability in photoluminescence of porous silicon. J. Lumin. 91 (2000) 195-202
9. Shibata H., Ito M., Asakursa M., and Watanabe K. A digital hygrometer using polymide film relative humidity sensor. IEEE Trans Instrum. Meas. 45 (1996) 564-569
10. Bjorkqvist M., Salonen J., Paski J., and Laine E. Comparision of stabilizing treatments on porous silicon for sensor applications. Phys. Stat. Sol. (a) 197 2 (2003) 374-377
11. Archer M., Christopherson M., and Fauchet P.M. Electrical porous silicon chemical sensor for detection of organic solvents. Sens. Actuators B 106 (2005) 347-357
12. Bjorkqvist, Salonen J., Paski J., and Laine E. Characterization of thermally carbonized porous silicon humidity sensor. Sens. Actuators A 112 (2004) 244-247
13. Islam T., Pramanik C., and Saha H. Modeling, simulation and temperature compensation of porous polysilicon capacitive humidity sensor using ANN technique. Micro-electron. Reliability 45 (2005) 697-703
14. Fraden J. Handbook of Modern Sensors, Physics, Designed and Applications (2003), Springer pp. 20-21
15. T. Islam, S. Ghose, H. Saha, ANN based signal conditioning and its hardware implementation of a nanostructured porous silicon relative humidity sensor, Sens. Actuators B, 2006, in press.
16. Hui D., Juan-hua L., and Zhong-ru S. Drift reduction of gas sensor by wavelet and principal component analysis. Sens. Actuators B 96 (2003) 354-363
17. Endres H.E., Gottler W., and Sberveglieri G. A systematic investigation on the use of time-dependent sensor signals in signal processing techniques. Sens. Actuators B 24-25 (1995) 785-789
18. Singh A.P., Kumar S., and Kamal T.S. Sens. Actuators A 111 (2004) 145-153
19. Khan S.A., Shahani D.T., and Agarwal A.K. Sensor calibration and compensation using neural network. ISA Trans. 42 (2003)
20. Patra J.C., Panda G., and Baliarsingh R. Artificial neural network-based nonlinearity estimation of pressure sensors. IEEE, Trans. Instrum. Meas. 43 (1994) 874-881
21. Haykin S. Neural Networks and Toronto (1994), Maxwell Macmillan, ON, Canada