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Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5172-5175
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Oxidation resistance of SiAlCN: H-coatings
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Author keywords
Mechanical properties; Oxidation resistance; PVD; Silico aluminum carbonitride; Thin film
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Indexed keywords
ELASTIC MODULI;
EMISSION SPECTROSCOPY;
GLOW DISCHARGES;
HARDNESS;
MAGNETRON SPUTTERING;
OXIDATION RESISTANCE;
PHYSICAL VAPOR DEPOSITION;
GLOW DISCHARGE OPTICAL EMISSION SPECTROMETRY;
SILICON-ALUMINUM-CARBON-NITRIDE;
SILICON NITRIDE;
ELASTIC MODULI;
EMISSION SPECTROSCOPY;
GLOW DISCHARGES;
HARDNESS;
MAGNETRON SPUTTERING;
OXIDATION RESISTANCE;
PHYSICAL VAPOR DEPOSITION;
SILICON NITRIDE;
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EID: 33846553513
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2006.07.204 Document Type: Article |
Times cited : (12)
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References (14)
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