메뉴 건너뛰기




Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5172-5175

Oxidation resistance of SiAlCN: H-coatings

(5) 


Author keywords

Mechanical properties; Oxidation resistance; PVD; Silico aluminum carbonitride; Thin film

Indexed keywords

ELASTIC MODULI; EMISSION SPECTROSCOPY; GLOW DISCHARGES; HARDNESS; MAGNETRON SPUTTERING; OXIDATION RESISTANCE; PHYSICAL VAPOR DEPOSITION;

EID: 33846553513     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.204     Document Type: Article
Times cited : (12)

References (14)
  • 5
    • 0029637640 scopus 로고
    • Riedel R., et al. Nature 374 (1995) 526
    • (1995) Nature , vol.374 , pp. 526
    • Riedel, R.1
  • 13


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.