Study of silicon micro-structuring using ultra-short laser pulses

Zhongguo Jiguang/Chinese Journal of Lasers

Volumn 33, Issue 12, 2006, Pages 1688-1691

  Li, Ping ^a   Wang, Yu ^a   Feng, Guo Jin ^a   Zheng, Chun Di ^a   Zhao, Li ^b   Zhu, Jing Tao ^b,c  

^a NATIONAL INSTITUTE OF METROLOGY   (China)

^b FUDAN UNIVERSITY   (China)

^c TONGJI UNIVERSITY   (China)

Author keywords

Laser technique; Light absorption; Silicon; Surface micro structuring; Ultra short laser pulse

Indexed keywords

INFRARED RADIATION; LASER BEAM EFFECTS; LASER PULSES; LIGHT ABSORPTION; ULTRASHORT PULSES;

BLACK SILICON; LASER IRRADIATION; LASER TECHNIQUE; SURFACE MICROSTRUCTURING; ULTRASHORT LASER PULSE;

LASER APPLICATIONS;

EID: 33846521250     PISSN: 02587025     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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