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Volumn 49, Issue 6, 2006, Pages 2321-2326

Determination of electron collision cross-sections for the C 3F8 molecule by using an electron swarm study

Author keywords

C3F8 (perfluoropropane); Electron collision cross section; Electron swarm study; Electron transport coefficients; Multi term Boltzmann equation analysis

Indexed keywords


EID: 33846518231     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (18)

References (16)
  • 4
    • 0004292174 scopus 로고
    • Academic Press, San Diego
    • A. R. Reinberg, Plasma Etching (Academic Press, San Diego, 1989), p. 339.
    • (1989) Plasma Etching , pp. 339
    • Reinberg, A.R.1
  • 12
    • 33846477637 scopus 로고    scopus 로고
    • B. H. Jeon and Y. Nakamura, J. IEEE Japan A 118, 868 (1998).
    • B. H. Jeon and Y. Nakamura, J. IEEE Japan A 118, 868 (1998).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.