Effect of negative self-bias voltage on microstructure and properties of DLC films deposited by RF glow discharge

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5043-5045

  Gou, Wei ^a   Li, Guoqing ^a   Chu, Xinpu ^a   Zhong, Bin ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

DLC; Negative self bias voltage; Raman spectroscopy; RF discharge

Indexed keywords

GLOW DISCHARGES; INDENTATION; MICROSTRUCTURE; RAMAN SPECTROSCOPY; THIN FILMS;

CARBON FILMS; NEGATIVE SELF-BIAS VOLTAGE;

ELECTRIC POTENTIAL;

ELECTRIC POTENTIAL; GLOW DISCHARGES; INDENTATION; MICROSTRUCTURE; RAMAN SPECTROSCOPY; THIN FILMS;

EID: 33846482451     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.199     Document Type: Article

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