Microstructure, chemistry, and tribological performance of MoSx/WSey co-sputtered composites

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 5, 2002, Pages 1682-1689

  Savan, A ^a   Haefke, H ^a   Simmonds, M C ^b   Constable, C P ^b  

^a CSEM   (Switzerland)

^b SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MATERIALS; MICROSTRUCTURE; MOLYBDENUM COMPOUNDS; SPUTTER DEPOSITION; STOICHIOMETRY; TRIBOLOGY; WEAR OF MATERIALS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CO-SPUTTERING;

THIN FILMS;

EID: 0036750322     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1497990     Document Type: Article

References (18)

1. M.R. Hilton and P.D. Fleischauer, Surf. Coat. Technol. 54/55, 435 (1992).
2. A. Aubert, J. Ph. Nabot, J. Ernoult, and Ph. Renaux, Surf. Coat. Technol. 41, 127 (1990).
3. J.A. Obeng and G.L. Schrader, Surf. Coat. Technol. 68/69, 422 (1994).
4. P.D. Fleischauer and R. Bauer, ASLE Trans. 31, 239 (1988).
5. J. Moser, F. Lévy, and F. Bussy, J. Vac. Sci. Technol. A 12, 494 (1994).
6. V. Buck, Thin Solid Films 139, 157 (1986).
7. N.J. Mikkelsen and G. Sorensen, Surf. Coat. Technol. 51, 118 (1992).
8. P.D. Fleischauer and J.R. Lince, Tribol. Int. 32, 627 (1999).
9. B.C. Stupp, Thin Solid Films 84, 257 (1981).
10. T. Spalvins, Thin Solid Films 118, 375 (1984).
11. D.G. Teer, J. Hampshire, V. Fox, and V. Bellido-Gonzalez, Surf. Coat. Technol. 94-95, 572 (1997).
12. V. Rigato, G. Maggioni, D. Boscarino, L. Sangaletti, L. Depero, V.C. Fox, D. Teer, and C. Santini, Surf. Coat. Technol. 116-119, 176 (1999).
13. J.R. Lince, M.R. Hilton, and A.S. Bommannavar, J. Mater. Res. 10, 2091 (1995).
14. M.R. Hilton, R. Bauer, S. Didziulis, M.T. Dugger, J.M. Keem, and J. Scholhamer, Surf. Coat. Technol. 53, 13 (1992).
15. J.S. Zabinski, M.S. Donley, S.D. Walck, T.R. Schneider, and N.T. Mcdevitt, Tribol. Trans. 38, 894 (1995).
16. M.C. Simmonds, A. Savan, E. Pflüger, and H. Van Swygenhoven, J. Vac. Sci. Technol. A 19, 609 (2001).
17. A. Savan, E. Pflüger, R. Goller, and W. Gissler, Surf. Coat. Technol. 126, 159 (2000).
18. M.C. Simmonds, A. Savan, E. Pflüger, and H. Van Swygenhoven, Surf. Coat. Technol. 126, 15 (2000).