A mask-free method of patterned porous silicon formation by a localized electrical field

Microelectronic Engineering

Volumn 84, Issue 2, 2007, Pages 336-339

  Lin, Jia Chuan ^a   Hou, Hsi Ting ^a   Tsai, Wei Chih ^b  

^a ST JOHN'S UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Mask free; Photoluminescence; Porous silicon

Indexed keywords

ELECTRIC FIELDS; ELECTRODES; ELECTROLYTES; PHOTOLITHOGRAPHY; PHOTOLUMINESCENCE;

MASK FREE METHOD; MASKING LAYERS; PATTERNED ELECTRODES; PHOTOLUMINESCENCE EMISSIONS;

POROUS SILICON;

EID: 33846255869     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.091     Document Type: Article

References (17)

1. Canham L.T. Appl. Phys. Lett. 57 (1990) 1046
2. McCord P., Yau S.L., and Bard A.J. Science 257 (1992) 68
3. Smestad G., and Ries H. Solar Energy Mater. Solar Cells 25 (1992) 51
4. Taliercio T., Dilhan M., Massone E., Gue A.M., Fraisse B., and Foucaran A. Thin Solid Films 255 (1992) 310
5. Yu L.Z., and Wie C.R. Electron. Lett. 28 (1992) 911
6. Watanabe Y., Arita Y., Yokoyama T., and Igarashi Y.J. Electrochem. Soc. 122 (1975) 1351
7. Canham L.T., Leong W.Y., Cox T.I., and Taylor L. Appl. Phys. Lett. 61 (1992) 2563
8. Fuchs H.D., Stutzmann M., Brandt M.S., Rosenbauer M., Weber J., Breitschwerdt A., Deak P., and Cardona M. Phys. Rev. B48 (1993) 8172
9. Cullis A.G., Canham L.T., and Calcott P.D.J. J. Appl. Phys. 82 (1997) 909
10. Sarathy J., Shih S., Jung K.H., Tsai C., Li K.H., Kwong D.L., and Campbell J.C. Appl. Phys. Lett. 60 (1992) 1532
11. Ksendzov A., Fathauer R.W., George T., Pike W.T., and Vasquez R.P. Appl. Phys. Lett. 63 (1993) 200
12. Kalem S., and Rosenbauer M. Appl. Phys. Lett. 67 (1995) 2551
13. Ghanashyam Krishna M., Rajendran M., Pyke D.R., and Bhattacharya A.K. Solar Energy Mater. Solar Cells 59 (1999) 377
14. Kalem S., and Yavuzcetin O. Opt. Exp. 6 (2000) 7
15. Saadoun M., Mliki N., Kaabi H., Daoudi K., Bessaïs B., Ezzaouia H., and Bennaceur R. Thin Solid Films 405 (2002) 29
16. Nassiopoulos A.G., Grigoropoulos S., Canham L., Halimaoui A., Berbezier I., Gogolides E., and Papadimitriou D. Thin Solid Films 255 (1995) 329
17. Krüger M., Arens-Fischer R., Thönissen M., Münder H., Berger M.G., Lüth H., Hilbrich S., and Theiss W. Thin Solid films 276 (1996) 257