Flextensional ultrasonic piezoelectric micro-motor

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 12, 2006, Pages 2357-2366

  Leinvuo, Joni T ^a,b   Wilson, Stephen A ^b   Whatmore, Roger W ^b,c   Cain, Markys G ^d  

^a CRANFIELD UNIVERSITY   (United Kingdom)

^b VTI Technologies Oy   (Finland)

^c UNIVERSITY COLLEGE CORK   (Ireland)

^d NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONVERTERS; IMAGE ANALYSIS; MACHINE DESIGN; PIEZOELECTRIC DEVICES; STATORS; ULTRASONIC DEVICES;

PIEZOELECTRIC PLATES; PIEZOELECTRIC ULTRASONIC MICRO MOTORS; ROTATIONAL MOVEMENT; STALL TORQUE;

ELECTRIC MOTORS;

ARTICLE; COMPUTER AIDED DESIGN; ELECTRICITY; ELECTROMAGNETIC FIELD; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; METHODOLOGY; MOTION; TRANSDUCER; ULTRASOUND;

COMPUTER-AIDED DESIGN; ELECTROMAGNETICS; ELECTROSTATICS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MINIATURIZATION; MOTION; TRANSDUCERS; ULTRASONICS;

EID: 33846251193     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.184     Document Type: Article

References (20)

1. K. Uchino, Piezoelectric Actuators and Ultrasonic Motors. Boston, MA: Kluwer Academic, 1997.
2. A. M. Flynn, L. S. Tavrow, S. F. Bart, R. A. Brooks, D. J. Ehrlich, K. R. Udayakumar, and L. E. Cross, "Piezoelectric micromotors for microrobots," in Proc. IEEE Ultrason. Symp., vol. 3, 1990, pp. 1163-1172.
3. "Piezoelectric ceramic products UK," Morgan Matroc Ltd., Unilator Division, Wrexham, Clwyd, UK.
4. P. Rayner, "Piezoelectric ultrasonic motors and micromotors," Ph.D. dissertation, Cranfleld University, Canfield, Bedford, UK, 2000.
5. T. Maeno, T. Tsukimoto, and A. Miyake, "Finite-element analysis of the rotor/stator contact in a ring-type ultrasonic motor," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 39, pp. 668-674, 1992.
6. K. Tani, M. Suzuki, T. Furuta, T. Sakuhara, and T. Ataka, "Development of a new type piezoelectric micromotor," in Proc. 11th Annu. Int. Workshop on MEMS, Heidelberg, Germany, 1998, pp. 396-401.
7. J. T. Leinvuo, S. A. Wilson, and R. W. Whatmore, "Flextensional ultrasonic motor using the contour mode of a square piezoelectric plate," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 8, pp. 929-936, 2004.
8. T. Uchiki, T. Nakazawa, K. Nakamura, M. Kurosawa, and S. Ueha, "Ultrasonic motor utilizing elastic fin rotor," Jpn. J. Appl. Phys., vol. 30, pp. 2289-2291, Sep. 1991.
9. T. Sashida and T. Kenjo, An Introduction to Ultrasonic Motors. New York: Oxford Univ. Press, 1993.
10. B. Jaffe, Jr., W. J. Cook, and H. Jaffe, Piezoelectric Ceramics. London: Academic Press, 1971.
11. J. Leinvuo, "Flextensional piezoelectric motors," Ph.D. dissertation, Cranfield University, Cranfield, Bedford, UK, 2004.
12. T. Uchiki, T. Nakazawa, K. Nakamura, M. Kurosawa, and S. Ueha, "Ultrasonic motor utilizing elastic fin rotor," in Proc. IEEE Ultrason. Symp., 1991, pp. 929-931.
13. "Sensors, vision systems & measuring instruments, 2001-2002," G2001-UK-2-0700, Keyence (UK) Ltd., Milton Keynes, Buckinghamshire, UK.
14. "The measurement and automation catalog, 2001," National Instruments Corporation (UK) Ltd., Newbury, Berkshire, UK.
15. K. Nakamura, M. Kurosawa, H. Kurebayashi, and S. Ueha, "An estimation of load characteristics of an ultrasonic motor by measuring transient responses," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 38, no. 5, pp. 481-485, 1991.
16. J. T. Leinvuo, S. A. Wilson, R. W. Whatmore, and A. E. Gee, "Mesoscale piezo-motors: Scaling issues and performance measurement," presented at Proc. 17th Annu. ASPE Meeting, St. Louis, MO, 2002, CDROM.
17. I. Fujimasa, Micromachines: A New Era in Mechanical Engineering. New York: Oxford Univ. Press, 1996.
18. S. Dong, S. P. Lim, K. H. Lee, J. Zhang, L. C. Lim, and K. Uchino, "Piezoelectric ultrasonic micromotor with 1.5 mm diameter," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, no. 4, pp. 361-367, Apr. 2003.
19. Phantom V4.0 data sheet. Photo-Sonics International Ltd. Thame, Oxon, UK 2003.
20. M. Dubois and P. Muralt, "PZT thin film actuated elastic fin micromotor," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, pp. 1169-1177, Sep. 1998.