Two-dimensional simulation of ac-driven microplasmas confined to 100-300 μm diameter cylindrical microcavities in dielectric barrier devices

Journal of Applied Physics

Volumn 100, Issue 12, 2006, Pages

  Seo, Jeong Hyun ^a,b   Eden, J Gary ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b SolarLight Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AC DRIVEN MICROPLASMAS; AXIAL DISCHARGE; CYLINDRICAL MICROCAVITIES; SPATIALLY RESOLVED ELECTRON;

AC MACHINERY; COMPUTER SIMULATION; DIELECTRIC DEVICES; ELECTRIC EXCITATION; ELECTRON ENERGY LEVELS; FLUID DYNAMICS; ION SOURCES;

PLASMA DEVICES;

EID: 33846103420     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2398024     Document Type: Article

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