A microcalorimeter EDS system suitable for low acceleration voltage analysis

Surface and Interface Analysis

Volumn 38, Issue 12-13, 2006, Pages 1646-1649

  Tanaka, Keiichi ^a   Odawara, Akikazu ^a   Nagata, Atsushi ^a   Ikeda, Masanori ^a   Baba, Yukari ^a   Nakayama, Satoshi ^a  

^a SII NANOTECHNOLOGY INC   (Japan)

Author keywords

EDS; High energy resolution; Low accelerate voltage; Micalocalorimter

Indexed keywords

DETECTORS; POLYIMIDES; SCANNING ELECTRON MICROSCOPY; SENSORS; VOLTAGE MEASUREMENT;

HIGH ENERGY RESOLUTION; LOW ACCELERATE VOLTAGE; MICALOCALORIMTERS; TRANSITION EDGE X-RAY SENSOR (TES);

ENERGY DISPERSIVE SPECTROSCOPY;

EID: 33845957695     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2408     Document Type: Conference Paper

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