Plasma beam alignment for the large-area substrates: Equipment and process

Journal of the Society for Information Display

Volumn 13, Issue 4, 2005, Pages 289-294

  Yaroshchuk, O V ^a   Kravchuk, R M ^a   Dobrovolskyy, A M ^a   Liu, P C ^b   Lee, C D ^b  

^a INSTITUTE OF HYDROBIOLOGY   (Ukraine)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Anode layer thruster; Liquid cyrstal alignment; Plasma processing; Plasma source

Indexed keywords

ALIGNMENT; PLASMAS; POWDERS;

ALIGNMENT SUBSTRATES; ANODE LAYER THRUSTER; ANODE LAYERS; CRYSTAL ALIGNMENTS; EASY AXIS; PLASMA BEAM ALIGNMENTS; PLASMA PROCESSING; RACE TRACKS; REPRODUCIBILITY;

SUBSTRATES;

EID: 33845934275     PISSN: 10710922     EISSN: None     Source Type: Journal    
DOI: 10.1889/1.1904928     Document Type: Conference Paper

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