Spectroscopic ellipsometry study of CVD molybdenum oxide films: Effect of temperature

Journal of Solid State Electrochemistry

Volumn 7, Issue 1, 2002, Pages 17-20

  Szekeres, Anna ^a   Ivanova, Tatyana ^b   Gesheva, Kostadinka ^b  

^a INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^b Central Laboratory of Solar Energy and New Energy Sources   (Bulgaria)

Author keywords

Chemical vapor deposition; Molybdenum oxide; Optical constants; Spectroscopic ellipsometry; Thin films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; ENERGY GAP; MOLYBDENUM COMPOUNDS; PYROLYSIS; SPECTROSCOPIC ANALYSIS;

ABSORPTION COEFFICIENTS; MOLYBDENUM OXIDE; OPTICAL CONSTANTS; SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 33845771710     PISSN: 14328488     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10008-002-0285-4     Document Type: Article

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