Extended range six-DOF high-precision positioner for wafer processing

IEEE/ASME Transactions on Mechatronics

Volumn 11, Issue 6, 2006, Pages 682-689

  Hu, Tiejun ^a   Kim, Won Jong ^b  

^a Bruker Corporation   (United States)

^b Texas A and M University   (United States)

Author keywords

Multi dimensional positioner; Precision motion control; Real time digital control; Semiconductor manufacturing

Indexed keywords

AUTOMATION; DEGREES OF FREEDOM (MECHANICS); DIGITAL CONTROL SYSTEMS; DIGITAL SIGNAL PROCESSING; MOTION CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE;

MULTI DIMENSIONAL POSITIONER; REAL-TIME DIGITAL CONTROL;

POSITION CONTROL;

EID: 33845724184     PISSN: 10834435     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMECH.2006.886224     Document Type: Article

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