Investigation of coincident site lattice boundary criteria in Cu thin films

Journal of Electronic Materials

Volumn 31, Issue 1, 2002, Pages 50-54

  Wright, Stuart I ^a  

^a EDAX TSL   (United States)

Author keywords

CSL; EBSD; Electron backscatter diffraction; OIM

Indexed keywords

COPPER COMPOUNDS; CRYSTAL ORIENTATION; GRAIN BOUNDARIES; MICROSTRUCTURE;

CSL BOUNDARY; DEVIATION TOLERANCE; ELECTRON BACKSCATTER DIFFRACTION;

THIN FILMS;

EID: 33845627715     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-002-0172-x     Document Type: Article

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