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Volumn 89, Issue 23, 2006, Pages
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Array of dielectric nanocomposite devices using photoepoxy Su-8 as the polymeric phase
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC LOSSES;
DIELECTRIC MATERIALS;
ELECTRODES;
EPOXY RESINS;
MAGNETRON SPUTTERING;
SCANNING ELECTRON MICROSCOPY;
BRUGGEMAN APPROXIMATIONS;
ELECTRODE DEPOSITION;
SILICON SUBSTRATES;
NANOSTRUCTURED MATERIALS;
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EID: 33845408246
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2402885 Document Type: Article |
Times cited : (4)
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References (14)
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