Direct-write electron-beam lithography of an IR antenna-coupled microbolometer onto the surface of a hemispherical lens

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2566-2569

  Middlebrook, C T ^a   Zummo, G ^a   Boreman, G D ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR GAP; ANTENNA COUPLED MICROBOLOMETER; DIRECT WRITE LITHOGRAPHY; HEMISPHERICAL LENS;

DIRECTIVE ANTENNAS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; OPTICAL INSTRUMENT LENSES; SUBSTRATES; SURFACE WAVES;

BOLOMETERS;

EID: 33845249119     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2360978     Document Type: Article

References (6)

1. I. Codreanu, F. J. González, and G. D. Boreman, Infrared Phys. Technol. 44, 155 (2003).
2. D. B. Rutledge, D. P. Neikirk, and D. P. Kasilingam, Int. J. Infrared Millim. Waves 10, 1 (1983).
3. C. R. Brewitt-Taylor, D. J. Gunton, and H. D. Rees, Electron. Lett. 7, 729 (1981).
4. M. Kominami, D. Pozar, and D. Schaubert, IEEE Trans. Antennas Propag. AP-33, 600 (1985).
5. J. Alda, C. Fumeaux, M. Gritz, D. Spencer, and G. Boreman, Infrared Phys. Technol. 41, 1 (2000).
6. D. Filipovic, G. Gauthier, S. Raman, and G. Rebeiz, IEEE Trans. Antennas Propag. 45, 760 (1997).