Responsivity of infrared antenna-coupled microbolometers for air-side and substrate-side illumination

Infrared Physics and Technology

Volumn 41, Issue 1, 2000, Pages 1-9

  Alda, Javier ^a,b   Fumeaux, Christophe ^a   Gritz, Michael A ^a   Spencer, David ^a,c   Boreman, Glenn D ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

^c Department of Theoretical and Applied Mechanics and the Cornell Nanofabrication Facility   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA RADIATION; DIPOLE ANTENNAS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED DETECTORS; LIGHT ABSORPTION; LIGHT TRANSMISSION; MATHEMATICAL MODELS; REFLECTION; SILICA; SILICON WAFERS; SUBSTRATES; THIN FILMS;

ANTENNA COUPLED MICROBOLOMETER; INTEGRATED INFRARED ANTENNA; LAYERED SUBSTRATE;

BOLOMETERS;

EID: 0034140793     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4495(99)00036-5     Document Type: Article

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