Proposal of a new microreactor for vertical chemical operation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2606-2611

  Utsumi, Yuichi ^a   Asano, Toshifumi ^a   Ukita, Yoshiaki ^a   Matsui, Katsuhiro ^b   Takeo, Masahiro ^b   Negoro, Seiji ^b  

^a UNIVERSITY OF HYOGO   (Japan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; FILTERS (FOR FLUIDS); FLOW OF FLUIDS; GENETIC ENGINEERING; SYNCHROTRON RADIATION; X RAY ANALYSIS;

MEDICINE MANUFACTURE; MICROREACTOR; POSTGENOME ANALYSIS; VERTICAL CHEMICAL OPERATION;

ELECTRIC REACTORS;

EID: 33845238674     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2366609     Document Type: Article

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