Mechanical gripper system for handling and assembly in MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4557, Issue , 2001, Pages 151-156

  Petrovic, Dragan ^a   Popovic, G ^a   Chatzitheodoridis, E ^a   Del Medico, O ^b   Almansa, A ^a   Detter, H ^a   Brenner, W ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b Inocon Technologie GmbH   (Austria)

Author keywords

Assembly; E DM; Electro discharge machining; Gripper; Handling; MEMS; Microparts; MST

Indexed keywords

ELECTRIC DISCHARGE MACHINING; GRIPPERS; INDUSTRIAL APPLICATIONS; ROBOTIC ASSEMBLY;

MICROPARTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035768055     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.442937     Document Type: Article

References (2)

1. S. Fatikow and U. Rembold, Microsystems Technology and Micro-robotics, Springer-Verlag, Berlin, 1997.
2. M. Cohn, K. Böhringer, A. Singh, J. Noworolsky, C. Keller, K. Goklberg, R. Howe, "Microassembly technologies for MEMS", in Proc. SPIE Micromachining and Microfabrication, Santa Clara, CA, USA, Sept. 20-22, pp. 216., 1998.