Characterisation of thin film piezoelectric materials by differential interferometric techniques

2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings

Volumn 2, Issue , 2006, Pages 670-673

  Cain, M G ^a,b   Stewart, M ^a,b   Downs, M ^c  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^b 6 the Woods Bldg   (United Kingdom)

^c NONE

Author keywords

Functional; Interferometer; Piezoelectric; Thin films

Indexed keywords

CERAMIC MATERIALS; INTERFEROMETRY; MEASUREMENT THEORY; MICROELECTROMECHANICAL DEVICES; OPTICS; SINGLE CRYSTALS; THIN FILMS;

DIFFERENTIAL INTERFEROMETRIC TECHNIQUES; FUNCTIONAL PROPERTIES; MICRO SYSTEMS TECHNOLOGY (MST); PIEZOELECTRIC THIN FILMS;

PIEZOELECTRIC MATERIALS;

EID: 33845208857     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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