Design of a new pzt based microphone and microspeaker

Integrated Ferroelectrics

Volumn 41, Issue 1-4, 2001, Pages 101-106

  Ren, Tian Ling ^a   Zhang, Lin Tao ^a   Liu, Li Tian ^a   Li, Zhi Jian ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Cantilever structure; Ferroelectrics; Multimorph model; PZT

Indexed keywords

CANTILEVER STRUCTURES; MICROSPEAKERS; PZT;

FERROELECTRIC MATERIALS; LEAD; MICROPHONES; ZINC OXIDE; ZIRCONIUM;

NANOCANTILEVERS;

EID: 50249154279     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584580108012812     Document Type: Article

References (9)

1. K. R. Udayakumar, S. F. Bart, A. M. Flynn, J. Chen, L. S. Tavrow, L. E. Cross, R. A. Brooks, and D. J. Ehrlich, Proc. IEEE-MEMS 109-113 (1991)
2. R. M. Moroney, R. M. White, and R. T. Howe, Proc. IEEE-MEMS 182-187 (1990)
3. P. R. Scheeper, A. G. H. Van der Donk, W. Olthuis, and P. Berveld, Sensors and Actuators A44. 1-11 (1994)
4. P. R. Scheeper, A. G. H. Van der Donk, W. Olthuis, and P. Berveld, I MEMS 1, 147-154 (1992)
5. S. S. Lee, R. P. Ried, and R. M. White, J. MEMS 5, 238-242 (1996)
6. R. P. Ried, E. S. Kim, D. M. Hong, and R. S. Muller, Proc. Micromech. Syst 23-32 (1992)
7. D. L. Devoe, and A. P. Pisano, J. MEMS 6, 256-270 (1997)
8. S. H. Chang, and C. C. Chou, IEEE Trans. Ultras. Ferroelec. Freq. Cont. 46, 441-451 (1999)
9. J. G. Smits, and A. Ballato, J. MEMS 3, 105-111 (1994)