New tool for targeting energy improvements in semiconductor manufacturing equipment

ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings

Volumn 2006, Issue , 2006, Pages 428-432

  Naughton, Phil ^a  

^a FREESCALE SEMICONDUCTOR INC   (United States)

Author keywords

Energy; Energy conversion factor; Total equivalent energy

Indexed keywords

GLOBAL WARMING; PROCESS CONTROL; PROJECT MANAGEMENT; RESOURCE ALLOCATION;

ENERGY CONVERSION FACTORS (ECF); SEMICONDUCTOR MANUFACTURING EQUIPMENT (SME); TOTAL ENERGY REQUIREMENTS; TOTAL EQUIVALENT ENERGY (TEE);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 33751401570     PISSN: 10788743     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.2006.1638796     Document Type: Conference Paper

References (4)

1. Chip industry wastes energy, money, says ISMI, EE TIMES, December 23, 2005
2. Naughton, Philip, Utility Requirements of the Semiconductor Industry, SEMATECH EUV Source Workshop, San Diego, CA, November 2005
3. Naughton, Philip, Measurement of Conservation of Energy by Semiconductor Manufacturing Equipment and setting of targets for improvements, 2005 IEEE In ternational Symposium on Semiconductor Manufacturing, September 13-15, 2005.
4. Semiconductor Equipment and Materials International, Inc., SEMI S23, Guide for Conservation of Energy, Utilities and Materials used by Semiconductor Manufacturing Equipment.