Measurement of conservation of energy by semiconductor manufacturing equipment and setting of targets for improvements

IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings

Volumn , Issue , 2005, Pages 7-16

  Naughton, Philip ^a,b,c  

^a FREESCALE SEMICONDUCTOR INC   (United States)

^b Freescale's Facility Technology Center   (United States)

^c International SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY UTILIZATION; PROJECT MANAGEMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SOCIETIES AND INSTITUTIONS;

ITRS; RESOURCE COMSUMPTION; SUPPLIERS;

ENERGY CONSERVATION;

EID: 28744437186     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/issm.2005.1513283     Document Type: Conference Paper

References (3)

1. Joint statement on the ninth meeting of the World Semiconductor Council, May 19, 2005, Kyoto, Japan
2. th Edition, pg. 85.
3. WWW.SEMI.ORG, All Standards are Copyright © Semiconductor Equipment and Materials International (SEMI®). All rights reserved., published with permission.