Cobalt silicide nanocrystal memory

Device Research Conference - Conference Digest, DRC

Volumn 2005, Issue , 2005, Pages 105-106

  Dengtao, Zhao ^a   Yan, Zhu ^a   Ruigang, Li ^a   Jianlin, Liu ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND EDGES; HOLE RETENTIONS; SELF-ALIGNED GROWTH; SI NANOCRYSTAL MEMORY;

CHEMICAL VAPOR DEPOSITION; COBALT COMPOUNDS; CRYSTAL GROWTH; MOS CAPACITORS; NITROGEN; NONVOLATILE STORAGE; RAPID THERMAL ANNEALING;

NANOSTRUCTURED MATERIALS;

EID: 33751341816     PISSN: 15483770     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DRC.2005.1553077     Document Type: Conference Paper

References (2)

1. P. Sullivan et al, ,J. Vac. Sci. Tecbnol. B 11, 1564 (1993)
2. N. J. Woods and S. Hall, Semicond. Sci. Technol. 11, 1103 (1996)