메뉴 건너뛰기




Volumn 51, Issue 21, 2006, Pages 2662-2668

Fabrication of copper nanorods by low-temperature metal organic chemical vapor deposition

Author keywords

Chemical vapour deposition; Copper nanorods; Organic metal decomposition in low temperature

Indexed keywords


EID: 33751275961     PISSN: 10016538     EISSN: 18619541     Source Type: Journal    
DOI: 10.1007/s11434-006-2128-7     Document Type: Article
Times cited : (11)

References (24)
  • 1
    • 0034275890 scopus 로고    scopus 로고
    • Characterizing the structure and properties of individual wire-like nanoentities
    • Wang Z L. Characterizing the structure and properties of individual wire-like nanoentities. Adv Mater, 2000, 12: 1295-1298
    • (2000) Adv Mater , vol.12 , pp. 1295-1298
    • Wang, Z.L.1
  • 2
    • 0030151105 scopus 로고    scopus 로고
    • Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization
    • Hwang S T, Shim I, Lee K O, et al. Bisethylacetoacetato Cu(II) as a novel metal-organic precursor for Cu film production by plasma-enhanced chemical vapor deposition toward ultra-large-scale integration metallization. J Mater Res, 1996, 11: 1051-1060
    • (1996) J Mater Res , vol.11 , pp. 1051-1060
    • Hwang, S.T.1    Shim, I.2    Lee, K.O.3
  • 3
    • 78649772536 scopus 로고    scopus 로고
    • Ultralarge scale integrated metallization and interconnects
    • Whitman C, Moslehi M N, Paranjpe A, et al. Ultralarge scale integrated metallization and interconnects. J Vac Sci Technol A, 1999, 17: 1893-1897
    • (1999) J Vac Sci Technol A , vol.17 , pp. 1893-1897
    • Whitman, C.1    Moslehi, M.N.2    Paranjpe, A.3
  • 4
    • 0037418379 scopus 로고    scopus 로고
    • One-dimensional nanostructures: Synthesis, characterization, and applications
    • Xia Y, Yang P, Sun Y, et al. One-dimensional nanostructures: Synthesis, characterization, and applications. Adv Mater, 2003, 15: 353-389
    • (2003) Adv Mater , vol.15 , pp. 353-389
    • Xia, Y.1    Yang, P.2    Sun, Y.3
  • 5
    • 0037450278 scopus 로고    scopus 로고
    • A novel method for preparing copper nanorods and nanowires
    • Liu W, Bando Y. A novel method for preparing copper nanorods and nanowires. Adv Mater, 2003, 15: 303-305
    • (2003) Adv Mater , vol.15 , pp. 303-305
    • Liu, W.1    Bando, Y.2
  • 7
    • 0035926095 scopus 로고    scopus 로고
    • One-step, solid-state reaction to the synthesis of copper oxide nanorods in the presence of a suitable surfactant
    • Wang W Z, Zhan Y J, Wang G H. One-step, solid-state reaction to the synthesis of copper oxide nanorods in the presence of a suitable surfactant. Chem Commun, 2001, 727-728
    • (2001) Chem Commun , pp. 727-728
    • Wang, W.Z.1    Zhan, Y.J.2    Wang, G.H.3
  • 8
    • 0029389718 scopus 로고
    • Change in the shape of copper nanoparticles in ordered phases
    • Tanori J, Pileni M P. Change in the shape of copper nanoparticles in ordered phases. Adv Mater, 1995, 7: 862-864
    • (1995) Adv Mater , vol.7 , pp. 862-864
    • Tanori, J.1    Pileni, M.P.2
  • 9
    • 0001260042 scopus 로고    scopus 로고
    • Control of the shape of copper metallic particles by using a colloidal system as template
    • Tanori J, Pileni M P. Control of the shape of copper metallic particles by using a colloidal system as template. Langmuir, 1997, 13: 639-646
    • (1997) Langmuir , vol.13 , pp. 639-646
    • Tanori, J.1    Pileni, M.P.2
  • 10
    • 15444380322 scopus 로고    scopus 로고
    • Structural investigations of copper nanorods by high-resolution TEM
    • Lisiecki I, Filankembo A, Sack-Kongehl H, et al. Structural investigations of copper nanorods by high-resolution TEM. Phys Rev B, 1999, 61: 4968-4974
    • (1999) Phys Rev B , vol.61 , pp. 4968-4974
    • Lisiecki, I.1    Filankembo, A.2    Sack-Kongehl, H.3
  • 11
    • 0001768907 scopus 로고    scopus 로고
    • Single-crystalline copper nanowires produced by electrochemical deposition in polymeric ion track membranes
    • Molares M E T, Buschmann V, Dobrev D, et al. Single-crystalline copper nanowires produced by electrochemical deposition in polymeric ion track membranes. Adv Mater, 2001, 13: 62-65
    • (2001) Adv Mater , vol.13 , pp. 62-65
    • Molares, M.E.T.1    Buschmann, V.2    Dobrev, D.3
  • 12
    • 0035578062 scopus 로고    scopus 로고
    • Etched heavy ion tracks in polycarbonate as template for copper nanowires
    • Molares M E T, Brötz J, Buschmann V, et al. Etched heavy ion tracks in polycarbonate as template for copper nanowires. Nucl Instrum Methods B, 2001, 185: 192-197
    • (2001) Nucl Instrum Methods B , vol.185 , pp. 192-197
    • Molares, M.E.T.1    Brötz, J.2    Buschmann, V.3
  • 13
    • 0037185656 scopus 로고    scopus 로고
    • Electrochemical synthesis of copper nanowires
    • Cao T, Meng G, Wang Y, et al. Electrochemical synthesis of copper nanowires. J Phys: Condens Matter, 2002, 14: 355-363
    • (2002) J Phys: Condens Matter , vol.14 , pp. 355-363
    • Cao, T.1    Meng, G.2    Wang, Y.3
  • 14
    • 0028594017 scopus 로고
    • Nanomaterials: A membrane-based synthetic approach
    • Martin C R. Nanomaterials: A membrane-based synthetic approach. Science, 1994, 266: 1961
    • (1994) Science , vol.266 , pp. 1961
    • Martin, C.R.1
  • 15
    • 0345763079 scopus 로고    scopus 로고
    • Supercritical fluid preparation of copper nanotubes and nanowires using mesoporous templates
    • Ziegler K J, Harrington P A, Ryan K M, et al. Supercritical fluid preparation of copper nanotubes and nanowires using mesoporous templates. J Phys: Condens Matter, 2003, 15: 8303-8314
    • (2003) J Phys: Condens Matter , vol.15 , pp. 8303-8314
    • Ziegler, K.J.1    Harrington, P.A.2    Ryan, K.M.3
  • 16
    • 0037450276 scopus 로고    scopus 로고
    • Supercritical fluid fabrication of metal nanowires and nanorods templated by multiwalled carbon nanotubes
    • Ye X R, Lin Y H, Wang C M, et al. Supercritical fluid fabrication of metal nanowires and nanorods templated by multiwalled carbon nanotubes. Adv Mater, 2003, 15: 316-319
    • (2003) Adv Mater , vol.15 , pp. 316-319
    • Ye, X.R.1    Lin, Y.H.2    Wang, C.M.3
  • 17
    • 0036589286 scopus 로고    scopus 로고
    • Current trends in patterning with copper
    • Rickerby J, Steinke J H G. Current trends in patterning with copper. Chem Rev, 2002, 102: 1525-1550
    • (2002) Chem Rev , vol.102 , pp. 1525-1550
    • Rickerby, J.1    Steinke, J.H.G.2
  • 18
    • 0035892153 scopus 로고    scopus 로고
    • Nanoparticle formation via copper (II) acetylacetonate vapor decomposition in the presence of hydrogen and water
    • Nasibulin A G, Kauppinen E I, Brown D P, et al. Nanoparticle formation via copper (II) acetylacetonate vapor decomposition in the presence of hydrogen and water. J Phys Chem B, 2001, 105: 11067-11075
    • (2001) J Phys Chem B , vol.105 , pp. 11067-11075
    • Nasibulin, A.G.1    Kauppinen, E.I.2    Brown, D.P.3
  • 19
    • 0032559316 scopus 로고    scopus 로고
    • Triblock copolymer syntheses of mesoporous silica with periodic 50 to 300 angstrom pores
    • Zhao D, Feng J, Huo Q, et al. Triblock copolymer syntheses of mesoporous silica with periodic 50 to 300 angstrom pores. Science, 1998, 279: 548-552
    • (1998) Science , vol.279 , pp. 548-552
    • Zhao, D.1    Feng, J.2    Huo, Q.3
  • 20
    • 19944406174 scopus 로고    scopus 로고
    • Short-time synthesis of SBA-15 using various silica sources
    • Fulvio P F, Pikus S, Jaroniec M. Short-time synthesis of SBA-15 using various silica sources. J Coll Inter Sci, 2005, 287: 717-720
    • (2005) J Coll Inter Sci , vol.287 , pp. 717-720
    • Fulvio, P.F.1    Pikus, S.2    Jaroniec, M.3
  • 21
    • 14944381914 scopus 로고    scopus 로고
    • Synthesis of nanoparticles using vapor-phase decomposition of copper(II) acetylacetonate
    • Nasibulin A G, Shurygina L I, Kauppinen E I. Synthesis of nanoparticles using vapor-phase decomposition of copper(II) acetylacetonate. Coll J, 2005, 67: 1-20
    • (2005) Coll J , vol.67 , pp. 1-20
    • Nasibulin, A.G.1    Shurygina, L.I.2    Kauppinen, E.I.3
  • 23
    • 0029323573 scopus 로고
    • CVD of copper using copper (I) and copper (II) β-diketonates
    • Naik M B, Gill W N, Wentorfn R H, et al. CVD of copper using copper (I) and copper (II) β-diketonates. Thin Solid Film, 1995, 262: 60-66
    • (1995) Thin Solid Film , vol.262 , pp. 60-66
    • Naik, M.B.1    Gill, W.N.2    Wentorfn, R.H.3
  • 24
    • 0029327113 scopus 로고
    • In situ mass spectral and IR studies of the role of auxiliary reagents in the enhancement of copper growth in the chemical vapor deposition of Cu(II) β-diketonate precursors
    • Kaloyerosa A E, Zheng B, Lou I, et al. In situ mass spectral and IR studies of the role of auxiliary reagents in the enhancement of copper growth in the chemical vapor deposition of Cu(II) β-diketonate precursors. Thin Solid Film, 1995, 262: 20-30
    • (1995) Thin Solid Film , vol.262 , pp. 20-30
    • Kaloyerosa, A.E.1    Zheng, B.2    Lou, I.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.