Bulk periodic structures formation on monocrystalline silicon surface under the action of compression plasma flows

Applied Surface Science

Volumn 253, Issue 4, 2006, Pages 1866-1872

  Astashynski, V M ^a   Ananin, S I ^a   Emelyanenko, A S ^a   Kostyukevich, E A ^a   Kuzmitzky, A M ^a   Zhvavy, S P ^a   Uglov, V V ^b  

^a B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

^b BELARUSIAN STATE UNIVERSITY   (Belarus)

Author keywords

Crystallization; Melting; Plasma accelerators (guns); Plasma processing; Surface modification

Indexed keywords

CRYSTALLIZATION; MELTING; PHASE TRANSITIONS; PLASMA FLOW; SURFACE TREATMENT;

MONOCRYSTALLINE SILICON; PLASMA ACCELERATORS (GUNS); PLASMA PROCESSING; THERMOELECTRIC INSTABILITY;

SILICON;

EID: 33751243310     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.03.023     Document Type: Article

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