Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 23, Issue 10, 2006, Pages 2639-2644

  Pristinski, Denis ^a   Kozlovskaya, Veronika ^a   Sukhishvili, Svetlana ^a  

^a Stevens Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; MEASUREMENT ERRORS; POLYMERS; REFRACTIVE INDEX;

DECOUPLING FILM THICKNESS; PHASE-MODULATED ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 33751231087     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.23.002639     Document Type: Article

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