Wide band frequency and in situ characterisation of high permittivity insulators (High-K) for H.F. integrated passives

Microelectronic Engineering

Volumn 83, Issue 11-12, 2006, Pages 2184-2188

  Lacrevaz, T ^a   Flechet B ^a   Farcy, A ^b   Torres, J ^b   Gros Jean, M ^b   Bermond, C ^a   Vo, T T ^a   Cueto, O ^c   Blampey, B ^a   Angenieux G ^a   Piquet, J ^a   de Crecy F ^c  

^a UNIVERSITÉ DE SAVOIE   (France)

^b STMICROELECTRONICS   (France)

^c CEA LETI   (France)

Author keywords

Characterization; Coplanar wave guide; Dielectrics; High frequency; High K; Permittivity

Indexed keywords

CHARACTERIZATION; DIELECTRIC MATERIALS; INTEGRATED CIRCUITS; OPTIMIZATION; PERMITTIVITY; RESONANCE; WAVEGUIDES;

HIGH FREQUENCY; HIGH-K; RESONANCE MECHANISMS;

INSULATING MATERIALS;

EID: 33751223218     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.030     Document Type: Article

References (6)

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